Design of the microelectromechanical logic element based on a comb-drive resonator

CMOS technology has nearly reached the physical limits of transistor scaling and exhibits significant operational limitations at extreme temperatures and ionizing radiation. This work proposes a methodology for designing logic elements based on an alternative technology utilizing comb-drive microelectromechanical resonators operating on a non-contact principle and reconfigurable during operation. A method is proposed for calculating the geometric parameters of the device using analytical expressions and considering technological norms necessary to achieve specified characteristics: the natural frequency of resonator oscillations (100 kHz) and the quality factor (20) at atmospheric pressure. Optimal geometric parameters of the device, characteristics of capacitive cells affecting the sensitivity of the device and the quality factor, taking into account air damping, are determined. The accuracy of the calculations is sufficient for designing photomasks without using specialized software. A compact model of a logic microelectromechanical element has been developed, allowing for system analysis of dynamic characteristics and implementation of a functionally complete set of logic operations. The developed design flow can be applied to create logic microelectromechanical elements with the possibility of reprogramming during operation and further cascading of such devices for constructing complex digital circuits. The article is useful for developers of microelectromechanical accelerometers and gyroscopes and proposes an alternative approach to creating three-dimensional models based on a library of parametric components and generating compact models for system analysis.

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