Devitsky O.V. Peculiarities of pulsed laser deposition of thin InGaAsN films in an active background gas atmosphere. Scientific and Technical Journal of Information Technologies, Mechanics and Optics. 2022;22(6):1085-1091. (In Russ.) https://doi.org/10.17586/2226-1494-2022-22-6-1085-1091
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