For citations:
Belikov A.V., Klochkov I.S., Alekseev I.V., Kapralov S.A. A study of a silicone film deposited on quartz glass under laser radiation. Scientific and Technical Journal of Information Technologies, Mechanics and Optics. 2022;22(1):1-9. (In Russ.) https://doi.org/10.17586/2226-1494-2022-22-1-1-9